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On-chip nanofluidic integration of acoustic sensors towards high Q in liquid

Journal Article


Abstract


  • This paper reports an on-chip acoustic sensor comprising a piston-mode film bulk acoustic resonator and a monolithically integrated nanochannel. The resonator with the channel exhibits a resonance frequency (f) of 2.5 GHz and a quality (Q) factor of 436 in deionized water. The f �� Q product is as high as 1.1 �� 1012, which is the highest among all the acoustic wave sensors in the liquid phase. The sensor consumes 2 pl liquid volume and thus greatly saves the precious assays in biomedical testing. The Q factor is investigated, and real-time viscosity tests of glucose solution are demonstrated. The highly miniaturized and integrated sensor is capable to be arrayed with readout-circuitry, which opens an avenue for portable applications and lab-on-chip systems.

UOW Authors


  •   Liang, Ji (external author)

Publication Date


  • 2017

Citation


  • Liang, J., Liu, Z., Zhang, H., Liu, B., Zhang, M., Zhang, H., & Pang, W. (2017). On-chip nanofluidic integration of acoustic sensors towards high Q in liquid. Applied Physics Letters, 111(20). doi:10.1063/1.4992046

Scopus Eid


  • 2-s2.0-85034212691

Volume


  • 111

Issue


  • 20

Place Of Publication


Abstract


  • This paper reports an on-chip acoustic sensor comprising a piston-mode film bulk acoustic resonator and a monolithically integrated nanochannel. The resonator with the channel exhibits a resonance frequency (f) of 2.5 GHz and a quality (Q) factor of 436 in deionized water. The f �� Q product is as high as 1.1 �� 1012, which is the highest among all the acoustic wave sensors in the liquid phase. The sensor consumes 2 pl liquid volume and thus greatly saves the precious assays in biomedical testing. The Q factor is investigated, and real-time viscosity tests of glucose solution are demonstrated. The highly miniaturized and integrated sensor is capable to be arrayed with readout-circuitry, which opens an avenue for portable applications and lab-on-chip systems.

UOW Authors


  •   Liang, Ji (external author)

Publication Date


  • 2017

Citation


  • Liang, J., Liu, Z., Zhang, H., Liu, B., Zhang, M., Zhang, H., & Pang, W. (2017). On-chip nanofluidic integration of acoustic sensors towards high Q in liquid. Applied Physics Letters, 111(20). doi:10.1063/1.4992046

Scopus Eid


  • 2-s2.0-85034212691

Volume


  • 111

Issue


  • 20

Place Of Publication