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The effect of sputtering deposition rate on the agglomeration and crystallization of Si clusters

Journal Article


Abstract


Publication Date


  • 2007

Citation


  • Du, X. W., Li, H., Lu, Y. W., Cui, L., & Yao, P. (2007). The effect of sputtering deposition rate on the agglomeration and crystallization of Si clusters. Materials Letters, 61(19-20), 4079-4082. doi:10.1016/j.matlet.2007.01.023

Web Of Science Accession Number


Start Page


  • 4079

End Page


  • 4082

Volume


  • 61

Issue


  • 19-20

Abstract


Publication Date


  • 2007

Citation


  • Du, X. W., Li, H., Lu, Y. W., Cui, L., & Yao, P. (2007). The effect of sputtering deposition rate on the agglomeration and crystallization of Si clusters. Materials Letters, 61(19-20), 4079-4082. doi:10.1016/j.matlet.2007.01.023

Web Of Science Accession Number


Start Page


  • 4079

End Page


  • 4082

Volume


  • 61

Issue


  • 19-20