In this paper, a new sol-gel method was developed to prepare the LiTaO 3 powder and thin film. In this method, hydrogen peroxide aqueous solution (H2O2) reacts with tantalum and lithium ethoxides ethanol solution. The property of transformation into pure LiTaO3 was demonstrated through annealing the precursor powder dried from the solution. Nano-sized lithium tantalate particles with dimension of 40-50 nm were obtained at a sintering temperature of 700 °C. Such aqueous solution is suitable for fabrication of lithium tantalate thin film. LiTaO3 thin films on Si and Pt/Si were fabricated through heat treatment of the spin coated wet films. The obtained thin film is characterized through measuring its ferroelectric and dielectric properties. © 2005 Elsevier B.V. All rights reserved.