CeO 2 buffer layers have been deposited on YSZ single crystal substrates via a radio-frequency sputtering method. We focused on the texture development of CeO 2 with out-of-plane alignment and its effects on a superconducting YBCO layer, which was deposited by metal organic deposition. CeO 2 layers were grown epitaxially on single crystal YSZ substrates and subsequent YBCO layers were also grown epitaxially from CeO 2 layers. It was observed that the intensity of CeO 2(200) decreased with deposition temperature. θ-2θ scan FWHM values of CeO 2(200) were inversely proportional to the peak intensities of CeO 2(200). The sample with the lowest CeO 2(200) intensity and poor out-of-plane alignment showed a strong reaction with the MOD-YBCO layer resulting in a thicker BaCeO 3 layer. The texture and superconducting property of the YBCO layer were affected indirectly by the formation of a BaCeO 3 layer at the interface between the CeO 2 and YBCO layers.