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Development and fabrication of cylindrical siliconon- insulator microdosimeter arrays

Conference Paper


Abstract


  • Recent developments in the fabrication and simulation of prototype silicon-on-insulator (SOI) microdosimeter arrays are presented. A new planar array design has been proposed which has a number of advantages over previous elongated parallelepiped and cylindrical mesa array designs. This novel planar array design, which incorporates a guard ring is based upon 2500 planar cylindrically-shaped p-i-n detectors and was fabricated via dopant diffusion and ion implantation. The dopant-diffused arrays were successfully fabricated and tested using both 2 um and 10 urn thick silicon-on-insulator substrates. TCAD modelling of the ion-implanted structure is presented which includes the electrostatic potential profile and the electric field distribution profile, showing possible avalanche signal multiplication around the n+ core of the microdosimeter. The alpha particle charge transient response was simulated to determine the charge collection at the sensitive region. ©2008 IEEE.

Publication Date


  • 2008

Citation


  • Lai, N. S., Lim, W. H., Ziebell, A. L., Reinhard, M. I., Rosenfeld, A. B., & Dzurak, A. S. (2008). Development and fabrication of cylindrical siliconon- insulator microdosimeter arrays. In IEEE Nuclear Science Symposium Conference Record (pp. 1044-1049). doi:10.1109/NSSMIC.2008.4774576

Scopus Eid


  • 2-s2.0-67649225696

Web Of Science Accession Number


Start Page


  • 1044

End Page


  • 1049

Abstract


  • Recent developments in the fabrication and simulation of prototype silicon-on-insulator (SOI) microdosimeter arrays are presented. A new planar array design has been proposed which has a number of advantages over previous elongated parallelepiped and cylindrical mesa array designs. This novel planar array design, which incorporates a guard ring is based upon 2500 planar cylindrically-shaped p-i-n detectors and was fabricated via dopant diffusion and ion implantation. The dopant-diffused arrays were successfully fabricated and tested using both 2 um and 10 urn thick silicon-on-insulator substrates. TCAD modelling of the ion-implanted structure is presented which includes the electrostatic potential profile and the electric field distribution profile, showing possible avalanche signal multiplication around the n+ core of the microdosimeter. The alpha particle charge transient response was simulated to determine the charge collection at the sensitive region. ©2008 IEEE.

Publication Date


  • 2008

Citation


  • Lai, N. S., Lim, W. H., Ziebell, A. L., Reinhard, M. I., Rosenfeld, A. B., & Dzurak, A. S. (2008). Development and fabrication of cylindrical siliconon- insulator microdosimeter arrays. In IEEE Nuclear Science Symposium Conference Record (pp. 1044-1049). doi:10.1109/NSSMIC.2008.4774576

Scopus Eid


  • 2-s2.0-67649225696

Web Of Science Accession Number


Start Page


  • 1044

End Page


  • 1049