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Copper-doped SnO2 thin films for PH3 detection

Journal Article


Abstract


  • Thin copper-doped SnO2 films have been shown to exhibit sensitivity to PH3 in the region of its threshold limit concentrations in air. The films were deposited by spraying alcohol solutions of SnCl4 and CuCl2 over hot quartz substrates with subsequent annealing in an oxygen atmosphere at high temperatures. The phase and chemical composition of the films were investigated, using X-ray phase and electron diffraction analyses and X-ray photoemission spectral and Auger emission spectral analyses. The gas sensitivity was estimated by the change in the electrical resistance of the film in the absence and in the presence of PH3. The films prepared by spraying working solutions with molar ratio CuCl2:SnCl4 = 1:4 exhibit the highest sensitivity towards 0.1 ppmn PH3 (Rair/Rgas = 15.5) at 170°C. At this temperature the selectivity with respect to hydrogen is at its highest. © 1992.

Publication Date


  • 1992

Citation


  • Ratcheva, T., Stambolova, I., & Konstantinov, K. (1992). Copper-doped SnO2 thin films for PH3 detection. Thin Solid Films, 217(1-2), 187-192. doi:10.1016/0040-6090(92)90628-O

Scopus Eid


  • 2-s2.0-0026925415

Start Page


  • 187

End Page


  • 192

Volume


  • 217

Issue


  • 1-2

Abstract


  • Thin copper-doped SnO2 films have been shown to exhibit sensitivity to PH3 in the region of its threshold limit concentrations in air. The films were deposited by spraying alcohol solutions of SnCl4 and CuCl2 over hot quartz substrates with subsequent annealing in an oxygen atmosphere at high temperatures. The phase and chemical composition of the films were investigated, using X-ray phase and electron diffraction analyses and X-ray photoemission spectral and Auger emission spectral analyses. The gas sensitivity was estimated by the change in the electrical resistance of the film in the absence and in the presence of PH3. The films prepared by spraying working solutions with molar ratio CuCl2:SnCl4 = 1:4 exhibit the highest sensitivity towards 0.1 ppmn PH3 (Rair/Rgas = 15.5) at 170°C. At this temperature the selectivity with respect to hydrogen is at its highest. © 1992.

Publication Date


  • 1992

Citation


  • Ratcheva, T., Stambolova, I., & Konstantinov, K. (1992). Copper-doped SnO2 thin films for PH3 detection. Thin Solid Films, 217(1-2), 187-192. doi:10.1016/0040-6090(92)90628-O

Scopus Eid


  • 2-s2.0-0026925415

Start Page


  • 187

End Page


  • 192

Volume


  • 217

Issue


  • 1-2