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Enhanced piezoelectric properties of solution-modified Ba(Zr0.2Ti0.8)O3-(Ba0.7Ca0.3)TiO3 thick films

Journal Article


Abstract


  • High-quality piezoelectric 0.5Ba(Zr0.2Ti0.8)O3-0.5(Ba0.7Ca0.3)TiO3 thick films with the thickness of 6 μm were prepared by screen printing with solution infiltration process. The modified films near the morphotropic phase boundary (MPB) showed very dense and homogenous microstructure with large grain size, and presented markedly enhanced piezoelectric properties with large remanent polarization of 22 μC/cm2 and a longitudinal piezoelectric constant d33 of 220 pC/N, which were over two times higher than those of the screen printed films without the solution infiltration process. The excellent piezoelectric properties comparable to the case of lead-based thick films, make the modified films a promising candidate for practical applications in lead-free microdevices such as piezoelectric microelectromechanical systems (MEMS).

Publication Date


  • 2015

Citation


  • Feng, Z., Luo, J., Zhang, W., Tang, X., Cheng, Z., Shi, D. & Dou, S. (2015). Enhanced piezoelectric properties of solution-modified Ba(Zr0.2Ti0.8)O3-(Ba0.7Ca0.3)TiO3 thick films. Journal of Alloys and Compounds, 632 651-654.

Scopus Eid


  • 2-s2.0-84923110131

Ro Metadata Url


  • http://ro.uow.edu.au/aiimpapers/1482

Number Of Pages


  • 3

Start Page


  • 651

End Page


  • 654

Volume


  • 632

Abstract


  • High-quality piezoelectric 0.5Ba(Zr0.2Ti0.8)O3-0.5(Ba0.7Ca0.3)TiO3 thick films with the thickness of 6 μm were prepared by screen printing with solution infiltration process. The modified films near the morphotropic phase boundary (MPB) showed very dense and homogenous microstructure with large grain size, and presented markedly enhanced piezoelectric properties with large remanent polarization of 22 μC/cm2 and a longitudinal piezoelectric constant d33 of 220 pC/N, which were over two times higher than those of the screen printed films without the solution infiltration process. The excellent piezoelectric properties comparable to the case of lead-based thick films, make the modified films a promising candidate for practical applications in lead-free microdevices such as piezoelectric microelectromechanical systems (MEMS).

Publication Date


  • 2015

Citation


  • Feng, Z., Luo, J., Zhang, W., Tang, X., Cheng, Z., Shi, D. & Dou, S. (2015). Enhanced piezoelectric properties of solution-modified Ba(Zr0.2Ti0.8)O3-(Ba0.7Ca0.3)TiO3 thick films. Journal of Alloys and Compounds, 632 651-654.

Scopus Eid


  • 2-s2.0-84923110131

Ro Metadata Url


  • http://ro.uow.edu.au/aiimpapers/1482

Number Of Pages


  • 3

Start Page


  • 651

End Page


  • 654

Volume


  • 632