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Ultra-thin 3-D detector: charge collection characterization and application for microdosimetry

Journal Article


Abstract


  • An ultra-thin 3-D detector (U3DTHIN) with a 10-\mum-thick active region has been proposed to apply for microdosimetry in heavy ion therapy where the ion beam incidence is normal to the detector. The advantage of the detector is that the detector substrate below the silicon-on-insulator layer has been etched away. Extremely small columnar 3-D electrodes allow the detector to be fully depleted at very low biases with a minimum dead region due to their size. In this paper, a charge collection study of the U3DTHIN detector carried out using an ion beam-induced charge collection (IBICC) technique is presented. The IBICC study utilized a microbeam of 5.5 MeV {\rm He}2 + and 20 MeV^{12}{\rm C} ions focused to approximately 1-\mum diameter. Full charge collection was observed from a bias as low as-10 V. A comparison of the detector response when irradiated from the front and rear side is also presented.

Publication Date


  • 2014

Citation


  • Tran, L. T., Prokopovich, D. A., Petasecca, M., Lerch, M. L., Fleta, C., Pellegrini, G., Guardiola, C., Reinhard, M. I. & Rozenfeld, A. (2014). Ultra-thin 3-D detector: charge collection characterization and application for microdosimetry. IEEE Transactions on Nuclear Science, 61 (6), 3472-3478.

Scopus Eid


  • 2-s2.0-84919881133

Ro Metadata Url


  • http://ro.uow.edu.au/eispapers/3831

Number Of Pages


  • 6

Start Page


  • 3472

End Page


  • 3478

Volume


  • 61

Issue


  • 6

Abstract


  • An ultra-thin 3-D detector (U3DTHIN) with a 10-\mum-thick active region has been proposed to apply for microdosimetry in heavy ion therapy where the ion beam incidence is normal to the detector. The advantage of the detector is that the detector substrate below the silicon-on-insulator layer has been etched away. Extremely small columnar 3-D electrodes allow the detector to be fully depleted at very low biases with a minimum dead region due to their size. In this paper, a charge collection study of the U3DTHIN detector carried out using an ion beam-induced charge collection (IBICC) technique is presented. The IBICC study utilized a microbeam of 5.5 MeV {\rm He}2 + and 20 MeV^{12}{\rm C} ions focused to approximately 1-\mum diameter. Full charge collection was observed from a bias as low as-10 V. A comparison of the detector response when irradiated from the front and rear side is also presented.

Publication Date


  • 2014

Citation


  • Tran, L. T., Prokopovich, D. A., Petasecca, M., Lerch, M. L., Fleta, C., Pellegrini, G., Guardiola, C., Reinhard, M. I. & Rozenfeld, A. (2014). Ultra-thin 3-D detector: charge collection characterization and application for microdosimetry. IEEE Transactions on Nuclear Science, 61 (6), 3472-3478.

Scopus Eid


  • 2-s2.0-84919881133

Ro Metadata Url


  • http://ro.uow.edu.au/eispapers/3831

Number Of Pages


  • 6

Start Page


  • 3472

End Page


  • 3478

Volume


  • 61

Issue


  • 6