In the last few decades, there is a global interest in micro products, and micro forming of metals is a promising micro manufacturing method. However, a comprehensive understanding of this process is absent. Therefore, this study aims to investigate micro deep drawing process via experimental and analysis work. Simulation results are in good agreement with the experimental data. The comparison between the finite element method (FEM) simulation and experimental results shows the feasibility of FEM simulation for micro deep drawing process. This research also lays a fundament of investigating micro forming process, especially micro deep drawing. © (2014) Trans Tech Publications, Switzerland.