An arrayed waveguide grating (AWG) demodulation integration microsystem is investigated in this study.
The system consists of a C-band on-chip LED, a 232 silicon nanowire-based coupler, a fiber Bragg grating
(FBG) array, a 1 3 8 AWG, and a photoelectric detector array. The coupler and AWG are made from
silicon-on-insulator wafers using electron beam exposure and response-coupled plasma technology.
Experimental results show that the excess loss in the MMI coupler with a footprint of 6 3 100 mm2 is
0.5423 dB. The 1 3 8 AWG with a footprint of 267 3 381 mm2 and a waveguide width of 0.4 mm exhibits a
central channel loss of 23.18 dB, insertion loss non-uniformity of 21.34 dB, and crosstalk level of
223.1 dB. The entire system is preliminarily tested. Wavelength measurement precision is observed to
reach 0.001 nm. The wavelength sensitivity of each FBG is between 0.04 and 0.06 nm/dB.