Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam

Polymer–metal microcantilever actuators have been fabricated using an innovative approach based on

focused ion beam micromachining technology. The fabrication involves depositing a thin metal film

onto the surface of the polymer and machining using the ion beam. The microcantilever created is then

extracted and transferred to a desirable support using a micromanipulator. This approach demonstrates

the potential for maskless and resistless prototyping of cantilevers that can be evaluated for use as

MEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene–platinum bimorph

microactuator with respect to temperature change is demonstrated via visual monitoring in a scanning

electron microscope with a heating stage. The performance of the bimorph cantilever microactuators is

verified using both analytical and finite element modeling.