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Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam

Journal Article


Abstract


  • Polymer–metal microcantilever actuators have been fabricated using an innovative approach based on

    focused ion beam micromachining technology. The fabrication involves depositing a thin metal film

    onto the surface of the polymer and machining using the ion beam. The microcantilever created is then

    extracted and transferred to a desirable support using a micromanipulator. This approach demonstrates

    the potential for maskless and resistless prototyping of cantilevers that can be evaluated for use as

    MEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene–platinum bimorph

    microactuator with respect to temperature change is demonstrated via visual monitoring in a scanning

    electron microscope with a heating stage. The performance of the bimorph cantilever microactuators is

    verified using both analytical and finite element modeling.

UOW Authors


  •   Lee, C C. (external author)
  •   Alici, Gursel
  •   Spinks, Geoff M.
  •   Proust, Gwenaelle (external author)
  •   Cairney, Julie M. (external author)

Publication Date


  • 2011

Citation


  • Lee, C. C., Alici, G., Spinks, G. M., Proust, G. & Cairney, J. M. (2011). Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam. Sensors and Actuators A: Physical, 172 (2), 462-470.

Scopus Eid


  • 2-s2.0-82955232909

Ro Metadata Url


  • http://ro.uow.edu.au/engpapers/2943

Has Global Citation Frequency


Number Of Pages


  • 8

Start Page


  • 462

End Page


  • 470

Volume


  • 172

Issue


  • 2

Place Of Publication


  • Switzerland

Abstract


  • Polymer–metal microcantilever actuators have been fabricated using an innovative approach based on

    focused ion beam micromachining technology. The fabrication involves depositing a thin metal film

    onto the surface of the polymer and machining using the ion beam. The microcantilever created is then

    extracted and transferred to a desirable support using a micromanipulator. This approach demonstrates

    the potential for maskless and resistless prototyping of cantilevers that can be evaluated for use as

    MEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene–platinum bimorph

    microactuator with respect to temperature change is demonstrated via visual monitoring in a scanning

    electron microscope with a heating stage. The performance of the bimorph cantilever microactuators is

    verified using both analytical and finite element modeling.

UOW Authors


  •   Lee, C C. (external author)
  •   Alici, Gursel
  •   Spinks, Geoff M.
  •   Proust, Gwenaelle (external author)
  •   Cairney, Julie M. (external author)

Publication Date


  • 2011

Citation


  • Lee, C. C., Alici, G., Spinks, G. M., Proust, G. & Cairney, J. M. (2011). Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam. Sensors and Actuators A: Physical, 172 (2), 462-470.

Scopus Eid


  • 2-s2.0-82955232909

Ro Metadata Url


  • http://ro.uow.edu.au/engpapers/2943

Has Global Citation Frequency


Number Of Pages


  • 8

Start Page


  • 462

End Page


  • 470

Volume


  • 172

Issue


  • 2

Place Of Publication


  • Switzerland