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Theoretical investigation about secondary deposition of thin-film formation by molecular dynamics simulation

Journal Article


Abstract


Authors


  •   Chen, Huawei (external author)
  •   Hagiwara, Ichiro (external author)
  •   Tieu, A Kiet.
  •   Kishimoto, Kikuo (external author)
  •   Liu, Qiang (external author)

Publication Date


  • 2007

Citation


  • Chen, H., Hagiwara, I., Tieu, A. K., Kishimoto, K. & Liu, Q. (2007). Theoretical investigation about secondary deposition of thin-film formation by molecular dynamics simulation. Journal of Crystal Growth, 303 (2), 530-536.

Scopus Eid


  • 2-s2.0-34247231604

Ro Metadata Url


  • http://ro.uow.edu.au/engpapers/3042

Number Of Pages


  • 6

Start Page


  • 530

End Page


  • 536

Volume


  • 303

Issue


  • 2

Abstract


Authors


  •   Chen, Huawei (external author)
  •   Hagiwara, Ichiro (external author)
  •   Tieu, A Kiet.
  •   Kishimoto, Kikuo (external author)
  •   Liu, Qiang (external author)

Publication Date


  • 2007

Citation


  • Chen, H., Hagiwara, I., Tieu, A. K., Kishimoto, K. & Liu, Q. (2007). Theoretical investigation about secondary deposition of thin-film formation by molecular dynamics simulation. Journal of Crystal Growth, 303 (2), 530-536.

Scopus Eid


  • 2-s2.0-34247231604

Ro Metadata Url


  • http://ro.uow.edu.au/engpapers/3042

Number Of Pages


  • 6

Start Page


  • 530

End Page


  • 536

Volume


  • 303

Issue


  • 2