Motion tracking control of piezo-driven flexure-based mechanism based on sliding mode strategy

This paper presents a motion tracking control

methodology based on sliding mode strategy for a flexure-based

micro/nano manipulator driven by a piezoelectric actuator. This

control methodology is proposed for tracking of desired motion

trajectories in the presence of uncertain system parameters,

non-linearities including the hysteresis effect, and external

disturbances in the control system. In this paper, a four-bar

link is investigated and a lumped parameter dynamic model is

established for the formulation of the proposed sliding mode

motion control methodology. The convergence of the position

tracking error to zero is assured by the approach in the

presence of the aforementioned conditions. The stability of

the closed-loop system is proven theoretically, and a precise

tracking performance in following a desired motion trajectory

is demonstrated in the experimental study. With the capability

of motion tracking, the proposed control methodology can be

employed in realising high performance flexure-based control

applications.