CeO2 has been widely used for buffer layers of YBCO coated conductor, however, CeO2 cannot be used as a single buffer layer to achieve a high Jc. Films of Ce2Y2O7 and Ce0.8Zr0.2O2 were deposited by electron-beam evaporation on biaxially textured Ni3%W substrates as single buffer layers. It was confirmed that controlling the deposition temperature could control the texture of the films. For the Ce2Y2O7, a pure c-axis texture can be obtained on Ni3%W. For the Ce0.8Zr0.2O2 there is still a small (1 1 1) peak, indicating some lack of pure c-axis orientation, even if the deposition temperature is high. XRD ÃÂ¸2ÃÂ¸ scans and -scans were employed to examine the texture. It is suggested that biaxially textured Ce2Y2O7 films are good potential candidates for a single buffer layer.