© 2020 Institute of Physics and Engineering in Medicine. Semiconductor dosimeters are ubiquitous in modern external-beam radiation therapy. They possess key features. The response, electronically available in real time, is stable and linear with absorbed dose for given irradiation conditions; the radiation-sensitive volume can be rather small in size, while retaining mechanical strength and high sensitivity. We describe three common semiconductor dosimeters: diodes, metal-oxide-semiconductor field-effect transistors and diamonds. We discuss in detail their operation principles and applications in modern external-beam radiation therapy, primarily with megavoltage photon beams. We also explore their use in proton and heavy ion therapy, and in experimental radiotherapy techniques such as synchrotron-based micro-beam radiation therapy.