© 1980-2012 IEEE. The accuracy of geometric parameters (mainly referred to the incidence angle and measuring distance) in a terrestrial laser scanner (TLS) is not only influenced by the TLS intrinsic systematic instrumental error but also the extrinsic received intensity data. However, the current error compensation methods for geometric parameters mainly focus on the calibration of TLS intrinsic systematic instrumental error and rarely consider the extrinsic intensity data correction. For this reason, this article presents a new method integrating the TLS intrinsic systematic instrumental error calibration and extrinsic intensity data correction to compensate the TLS geometric parameter error. The error compensation procedure is implemented as follows. First, the error compensation mathematical model integrated with TLS intrinsic systematic instrumental error calibration parameters and extrinsic intensity data correction coefficient is established. Second, the hybrid harmonic analysis (HA) and the adaptive wavelet neural network (AWNN) algorithm are proposed to calculate the TLS incidence angle error compensation values. Subsequently, the cubic spline interpolation (CSI) is applied to compute the measuring distance error compensate values. Finally, the TLS (model FARO Focus S150) and the hemispherical angle calibration instrument were used to evaluate the proposed compensation method. The experimental results demonstrate that the geometric parameters are significantly influenced by the intensity data received from TLS, and the proposed method can effectively improve the overall accuracy of the TLS incidence angle and measuring distance.