© 2019 Trans Tech Publications Ltd, Switzerland. Pure titanium TA1 foil with a thickness of 0.05mm under different grain sizes were carried out by the DT-C539 micro-stamping machine in the laboratory. The size effect of the pure titanium TA1 foil with grain sizes of 3, 7, 9 and 23 microns respectively on surface morphology of the microstamping sample were studied. It is found that the stamping samples with good surface quality can be obtained on the condition that the grain size is 23 microns and the stamping speed is 1mm/s. VORONOI model was established by using ABAQUS, NEPER and MATLAB software. Heterogeneous finite element simulation was carried out for the micro-stamping process under the same conditions. The results showed that the simulation results were more consistent with the experimental results.