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Study on a flexoelectric microphone using barium strontium titanate

Journal Article


Abstract


  • In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm  ×  768 μm  ×  50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

UOW Authors


  •   Kwon, Seol Ryung. (external author)
  •   Huang, Wenbin (external author)
  •   Zhang, Shujun
  •   Yuan, Fuh Gwo. (external author)
  •   Jiang, Xiaoning (external author)

Publication Date


  • 2016

Citation


  • Kwon, S. R., Huang, W. B., Zhang, S. J., Yuan, F. G. & Jiang, X. N. (2016). Study on a flexoelectric microphone using barium strontium titanate. Journal Of Micromechanics And Microengineering, 26 (4), 045001-1-045001-9.

Scopus Eid


  • 2-s2.0-84962148720

Ro Metadata Url


  • http://ro.uow.edu.au/aiimpapers/2840

Start Page


  • 045001-1

End Page


  • 045001-9

Volume


  • 26

Issue


  • 4

Place Of Publication


  • United Kingdom

Abstract


  • In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm  ×  768 μm  ×  50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

UOW Authors


  •   Kwon, Seol Ryung. (external author)
  •   Huang, Wenbin (external author)
  •   Zhang, Shujun
  •   Yuan, Fuh Gwo. (external author)
  •   Jiang, Xiaoning (external author)

Publication Date


  • 2016

Citation


  • Kwon, S. R., Huang, W. B., Zhang, S. J., Yuan, F. G. & Jiang, X. N. (2016). Study on a flexoelectric microphone using barium strontium titanate. Journal Of Micromechanics And Microengineering, 26 (4), 045001-1-045001-9.

Scopus Eid


  • 2-s2.0-84962148720

Ro Metadata Url


  • http://ro.uow.edu.au/aiimpapers/2840

Start Page


  • 045001-1

End Page


  • 045001-9

Volume


  • 26

Issue


  • 4

Place Of Publication


  • United Kingdom