Modern stereotactic radiation therapy modalities utilize small beams and large dose gradients to deliver radiation in few fractions, reducing the possibility to correct for mistakes during the treatment process. Therefore, in order to ensure best possible treatment for the patient, quality assurance for such treatments necessitates a stable, linear, and sensitive radiation detector with high spatial resolution and radiation hardness. In this work, two silicon detector arrays with high spatial resolution have been characterized by 6 MV and 18 MV medical LINAC irradiation, and 5.5 MeV He2+ heavy ion microprobe. A maximum discrepancy of 0.6 mm in field size has been found when comparing to two-dimensional radiochromic film dose profile, and charge collection efficiency obtained by means of ion beam induced charge collection (IBICC) is 66% when operating the array in photovoltaic mode. Radiation damage study by photons and photoneutrons is presented.