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6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3

Journal Article


Abstract


  • Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

UOW Authors


  •   Yu, Fapeng (external author)
  •   Zhang, Shujun
  •   Zhao, Xian (external author)
  •   Yuan, Duorong (external author)
  •   Wang, Qing Ming. (external author)
  •   Shrout, Thomas R. (external author)

Publication Date


  • 2011

Citation


  • Yu, F., Zhang, S., Zhao, X., Yuan, D., Wang, Q. & Shrout, T. R. (2011). 6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3. Physica Status Solidi - Rapid Research Letters, 5 (2), 47-49.

Scopus Eid


  • 2-s2.0-79251555295

Ro Metadata Url


  • http://ro.uow.edu.au/aiimpapers/2089

Has Global Citation Frequency


Number Of Pages


  • 2

Start Page


  • 47

End Page


  • 49

Volume


  • 5

Issue


  • 2

Place Of Publication


  • Germany

Abstract


  • Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

UOW Authors


  •   Yu, Fapeng (external author)
  •   Zhang, Shujun
  •   Zhao, Xian (external author)
  •   Yuan, Duorong (external author)
  •   Wang, Qing Ming. (external author)
  •   Shrout, Thomas R. (external author)

Publication Date


  • 2011

Citation


  • Yu, F., Zhang, S., Zhao, X., Yuan, D., Wang, Q. & Shrout, T. R. (2011). 6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3. Physica Status Solidi - Rapid Research Letters, 5 (2), 47-49.

Scopus Eid


  • 2-s2.0-79251555295

Ro Metadata Url


  • http://ro.uow.edu.au/aiimpapers/2089

Has Global Citation Frequency


Number Of Pages


  • 2

Start Page


  • 47

End Page


  • 49

Volume


  • 5

Issue


  • 2

Place Of Publication


  • Germany