Optoelectronic integration technologies based on silicon-on-insulator (SOI) can bring revolutionary change to on-chip arrayed waveguide grating (AWG) demodulation systems. In this study, we present several ultrasmall 1 x N AWGs for an SOI-based AWG demodulation integration microsystem of different scales. The core sizes of the fabricated AWGs are smaller than 400 × 600 μm2. Experimental results match the simulation results, indicating that AWGs have a good transmission spectrum of low crosstalk below -20 dB and low insertion loss below -6.5 dB. The fabricated AWGs can be perfectly applied to improve the integration level and performance of the SOI-based AWG demodulation integration microsystem.