This project aims to establish methodologies to produce functional micro/nano devices with embedded actuation by investigating fundamental micro/nano fabrication problems. To demonstrate the methodologies, micro and nano-sized devices based on electroactive polymer actuators that will operate both in wet and dry(air) media will be produced. To this aim, we propose to synergistically combine optimised electron beam lithography, focused ion beam, and scanning probe lithography techniques, supported by modeling, analysis and simulation modules. The project outcomes will include acquiring new knowledge in the fabrication of micro/nano-sized devices and understanding fundamental performance of the devices fabricated from electroactive polymers.
This project aims to establish methodologies to produce functional micro/nano devices with embedded actuation by investigating fundamental micro/nano fabrication problems. To demonstrate the methodologies, micro and nano-sized devices based on electroactive polymer actuators that will operate both in wet and dry(air) media will be produced. To this aim, we propose to synergistically combine optimised electron beam lithography, focused ion beam, and scanning probe lithography techniques, supported by modeling, analysis and simulation modules. The project outcomes will include acquiring new knowledge in the fabrication of micro/nano-sized devices and understanding fundamental performance of the devices fabricated from electroactive polymers.
