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A multi-functional plasma enhanced atomic layer deposition facility

Grant


Scheme


  • Linkage Infrastructure Equipment & Facilities (LIEF)

Abstract


  • This project aims to establish a multifunctional atomic layer nanofabrication facility in Sydney with the capacity to provide services nation-wide. The facility has powerful capabilities to produce mono-atom thin films, nanosize powders and two-dimensional nanostructures of a variety of materials, including elemental metals, metal oxides, metal nitrides, metal sulfides, metal-metal compounds, and polymers. This will significantly enhance Australian research and industrial activities in the areas of renewable energy production and storage, microelectronics, chemical and bio-sensors, protective coatings, flexible electronic devices, and catalysis.

Date/time Interval


  • 2018

Sponsor Award Id


  • LE180100129

Local Award Id


  • 124982

Scheme


  • Linkage Infrastructure Equipment & Facilities (LIEF)

Abstract


  • This project aims to establish a multifunctional atomic layer nanofabrication facility in Sydney with the capacity to provide services nation-wide. The facility has powerful capabilities to produce mono-atom thin films, nanosize powders and two-dimensional nanostructures of a variety of materials, including elemental metals, metal oxides, metal nitrides, metal sulfides, metal-metal compounds, and polymers. This will significantly enhance Australian research and industrial activities in the areas of renewable energy production and storage, microelectronics, chemical and bio-sensors, protective coatings, flexible electronic devices, and catalysis.

Date/time Interval


  • 2018

Sponsor Award Id


  • LE180100129

Local Award Id


  • 124982