Facility for characterisation of engineered microelectromechanical systems

Collaborating Organisation

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• CSIRO  Research Organization
• University Of New South Wales  Research Organization
• University Of Newcastle  Research Organization

Scheme

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• Linkage Infrastructure Equipment & Facilities (LIEF)

Date/time Interval

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• 2012

Research Areas

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• 090602 - CONTROL SYSTEMS, ROBOTICS AND AUTOMATION
• 091009 - MICROTECHNOLOGY
• 091306 - MICROELECTROMECHANICAL SYSTEMS (MEMS)

Awarded By

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• Australian Research Council (ARC) 

Contributor

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• Alici, Gursel - Chief Investigator
• Li, Weihua - Chief Investigator

Geographic Focus

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• Australia 

Geographic Focus

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• Australia  Country

Sponsor Award Id

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• LE120100215

Local Award Id

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• 102206